1 ◆ ◆ ◆ ◆ ◆ ◆ 202352323723331 A10716/14nm18nmDRAM128NANDLam ResearchKLA 3111431623193nm휆0.25푁퐴45푅=푘1휆푁퐴0.25푘138nm23ASMLNikonArFi 2022273.525.4%VLSI Research2021Top10TEL2021169.33Advantest6DNS7 TELFY23CY22.4-CY23.3 2022186.858.931.5%60%55.2%31.1%30% AJ-/-CVD-CVD--CVD/ALD--CMP ifind ifind ifind ifind ifind ifind ifind ifind ifind