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108 Cherry Hill DriveBeverly,Massachusetts01915(Address of principal executive offices) (zip code)(978)787-4000(Registrant’s telephone number, including area code) Securities registered pursuant to Section12(b) of the Act: Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule405 of the Securities Act.Yes⌧No◻ Indicate by check mark if the registrant is not required to file reports pursuant to Section13 or Section15(d) of theAct.Yes◻No⌧ Indicate by check mark whether the registrant (1)has filed all reports required to be filed by Section13 or 15(d) of the SecuritiesExchange Act of 1934 during the preceding 12months (or for such shorter period that the registrant was required to file suchreports), and (2)has been subject to such filing requirements for the past 90days.Yes⌧No◻ Indicate by checkmark whether the registrant has submitted electronically every Interactive Data File required to be submittedpursuant to Rule405 of RegulationS-T during the preceding 12months (or for such shorter period that the registrant was requiredto submit such files).Yes⌧No◻ Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smallerreporting company or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smallerreporting company” and “emerging growth company” in Rule12b-2 of the Exchange Act. Large acceleratedfiler⌧Accelerated filer◻Non-accelerated filer◻Smaller reportingcompany☐Emerging growth company☐ If an emerging growth company, indicate by check mark if registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.◻ Indicate by check mark whether the registrant has filed a report on and attestation to its management’s assessment of theeffectiveness of its internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b))by the registered public accounting firm that prepared or issued its audit report.⌧ If securities are registered pursuant to Section 12(b) of the Act, indicate by check mark whether the financial statements of theregistrant included in the filing reflect the correction of an error to previously issued financial statements. Indicate by check mark whether any of those error corrections are restatements that required a recovery analysis of incentive-based compensation received by any of the registrant’s executive officers during the relevant recovery period pursuant to§240.10D-1(b). Indicate by check mark whether the registrant is a shell company (as defined in Rule12b-2 of the Act).Yes☐No⌧ Aggregate market value of the voting stock held by non-affiliates of the registrant as of June30, 2024: $4,617,739,619 Number of shares outstanding of the registrant’s Common Stock, $0.001 par value, as of February 24, 2025:32,154,139 Documents incorporated by reference: Portions of the definitive Proxy Statement for Axcelis Technologies,Inc.’s Annual Meeting of Stockholders to be held on May7,2025 are incorporated by reference into PartIII of this Form10-K. PART I Item1. Business. Overview of Our Business Axcelis Technologies,Inc. (“Axcelis,” the “Company,” “we,” “us,” or “our”) designs,manufactures and services ion implantation and other processing equipment used in the fabrication ofsemiconductor chips. We believe that our Purion family of products offers the most innovativeimplanters available on the market today. We sell to leading semiconductor chip manufacturersworldwide. The ion implantation business represented 98.3% of our revenue in 2024, with theremaining 1.7% of revenue derived from aftermarket sales associated with other legacy processingsystems. In addition to equipment, we provide extensive aftermarket lifecycle products and services,including used tools, spare parts, equipment upgrades, maintenance services and customer training. Axcelis’ business commenced in 1978 and its current corporate entity was incorporated inDelaware in 1995. We are headquartered in Beverly, Massachusetts and maintain an internet site atwww.axcelis.com. On or through our website, investors may access, free of charge, our annual reportson Form10-K, quarterly reports on Form10-Q, current reports on Form8-K, and amendments to thosereports filed or furnished pursuant to Section13(a) or 15(d) of the Exchange Act as soon as reasonablypracticable after we electronically file such material with, or furnish it to, the Securities and ExchangeCommission. Our website and the information contained therein or connected thereto shall not bedeemed to be incorporated into this Annual Report on Form10-K. Revenue for 2024 was $1,017.9 million, compared to $1,130.6 million in 2023. Systems revenuefor 2024 was $782.6 million, compared to $883.6 million in 2023. Gross margin percent for 2024 was44.7% compared